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Journal: Journal of Vacuum Science & Technology A J Vac Sci Technol A ISSN (P) 0734-2101 ISSN (E) 1520-8559 ISSN (L) 0734-2101
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)

There are no additional documents for this Publisher/Journal.
Item Type: Journal/Series
Publication Type: Journal
Refereed: Yes
OA Permissions:
Article VersionAllowedEmbargoS/R Policy IdConditionsLicenseCopyright Owner
Accepted ManuscriptYes7Publisher copyright and source must be acknowledged with set statement (see policy)
Must link to published version
Published PDFYes12 Months7Must link to published version
Publisher copyright and source must be acknowledged with set statement (see policy)
Published PDFHybrid7CC BYAuthors
Publisher Statement: For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ: No, journal is not listed in DOAJ
URL:
URLURL Type
https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/Sharing Content Online
https://publishing.aip.org/resources/researchers/open-science/Author Select
https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/AIP Publishing Policy for NIH/PubMed Central
Sherpa Romeo Id: 14745
Divisions: Unspecified
Article Processing Charge(s):
FeeCurrencyDate
R&P Contract available?: Yes
R&P Contract Details:
Contract Name/TitlePeriod of validityContract ID or numberURL of web page
American Institute of Physics Journals01.01.2022 - 31.12.2022AIP2022https://avs.scitation.org/toc/jva/current
American Institute of Physics Journals01.01.2023-31.12.2023AIP2023https://avs.scitation.org/toc/jva/current
Date Deposited: 06 Jul 2016 13:35
Last Modified: 25 Mar 2024 01:17
URI: https://www.jdb.uzh.ch/id/eprint/35996

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