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Journal Database (Zurich Open Repository and Archive)

Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics J Vac Sci Technol B Nanotechnol Microelectron ISSN (P) 2166-2746 ISSN (E) 2166-2754 ISSN (L) 2166-2746
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)

There are no additional documents for this Publisher/Journal.
Item Type: Journal/Series
Publication Type: Journal
Refereed: Yes
OA Permissions:
Article VersionAllowedEmbargoS/R Policy IdConditionsLicenseCopyright Owner
Accepted ManuscriptYes7Publisher copyright and source must be acknowledged with set statement (see policy)
Must link to published version
Published PDFYes12 Months7Must link to published version
Publisher copyright and source must be acknowledged with set statement (see policy)
Publisher Statement: For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ: No
URL:
URLURL Type
http://scitation.aip.org/content/avs/journal/jvstbJournal
https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/Sharing Content Online
https://publishing.aip.org/resources/researchers/open-science/Author Select
https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/AIP Publishing Policy for NIH/PubMed Central
Conflict: No
Refereed Source: Ulrichsweb
Ulrichsweb ID: -1
Sherpa Romeo Id: 30676
Divisions: 07 Faculty of Science > Physics Institute
Article Processing Charge(s):
FeeCurrencyDate
R&P Contract available?: Yes
R&P Contract Details:
Contract Name/TitlePeriod of validityContract ID or numberURL of web page
American Institute of Physics Journals01.01.2022 - 31.12.2022AIP2022https://avs.scitation.org/toc/jvb/current
Date Deposited: 06 May 2014 08:17
Last Modified: 24 Jun 2022 00:19
URI: https://www.jdb.uzh.ch/id/eprint/34162

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