Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics J Vac Sci Technol B Nanotechnol Microelectron Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 2166-2746 ISSN (E) 2166-2754 ISSN (L) 2166-2746

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Item Type:	Journal/Series
Publication Type:	Journal
Refereed:	Yes
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Publisher Statement:	For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ:	No
URL:	URL URL Type http://scitation.aip.org/content/avs/journal/jvstb Journal https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/ Sharing Content Online https://publishing.aip.org/resources/researchers/open-science/ Author Select https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/ AIP Publishing Policy for NIH/PubMed Central
Conflict:	No
Refereed Source:	Ulrichsweb
Ulrichsweb ID:	-1
Sherpa Romeo Id:	30676
Divisions:	07 Faculty of Science > Physics Institute
Article Processing Charge(s):	Fee Currency Date
R&P Contract Details:	Contract Name/Title Period of validity Contract ID or number URL of web page
Date Deposited:	06 May 2014 08:17
Last Modified:	26 Jul 2021 00:15
URI:	https://www.jdb.uzh.ch/id/eprint/34162