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Journal Database (Zurich Open Repository and Archive)

Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics J Vac Sci Technol B Nanotechnol Microelectron Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 2166-2746 ISSN (E) 2166-2754 ISSN (L) 2166-2746

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Item Type: Journal/Series
Publication Type: Journal
Refereed: Yes
OA Permissions:
Article VersionAllowedEmbargoS/R Policy IdConditionsLicenseCopyright Owner
Accepted ManuscriptYes7Publisher copyright and source must be acknowledged with set statement (see policy)
Must link to published version
Published PDFYes12 Months7Must link to published version
Publisher copyright and source must be acknowledged with set statement (see policy)
Publisher Statement: For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ: No
URL:
URLURL Type
http://scitation.aip.org/content/avs/journal/jvstbJournal
https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/Sharing Content Online
https://publishing.aip.org/resources/researchers/open-science/Author Select
https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/AIP Publishing Policy for NIH/PubMed Central
Conflict: No
Refereed Source: Ulrichsweb
Ulrichsweb ID: -1
Sherpa Romeo Id: 30676
Divisions: 07 Faculty of Science > Physics Institute
Article Processing Charge(s):
FeeCurrencyDate
Date Deposited: 06 May 2014 08:17
Last Modified: 01 Sep 2020 17:29
URI: https://www.jdb.uzh.ch/id/eprint/34162

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