Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics J Vac Sci Technol B Nanotechnol Microelectron Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 2166-2746 ISSN (E) 2166-2754 ISSN (L) 2166-2746

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Item Type:	Journal/Series
Refereed:	Yes
Accepted Manuscript:	Yes
Published PDF:	Yes
Embargo Published PDF:	12 months
Publisher Statement:	For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
URL:	URL URL Type http://scitation.aip.org/content/avs/journal/jvstb Journal http://publishing.aip.org/authors/web-posting-guidelines Copyright Policy http://publishing.aip.org/authors/copyright-reuse Copyright Policy http://publishing.aip.org/librarians/open-access-policy Paid Access
Conflict:	No
Refereed Source:	Ulrichsweb
Ulrichsweb ID:	-1
Divisions:	07 Faculty of Science > Physics Institute
Sherpa Romeo ID:	7
Sherpa/RoMEO conditions:	Authors retain copyright Author's pre-print on arXiv or preprint server Author's post-print on free e-print servers or arXiv, author's personal website, institutional website, funding-agency repository, institutional repository, or social academic network upon acceptance Publishers version/PDF may be used on author's personal website, arXiv, institutional website, institutional repository, funders designated repository or private forums on social academic network after 12 months embargo Must link to publisher version or journal home page Publisher copyright and source must be acknowledged with set statement (see policy) NIH-funded articles are automatically deposited with PubMed Central with open access after 12 <period For Medical Physics see AAPM policy This policy does not apply to Physics Today Publisher last contacted on 15/07/2016 Publisher last reviewed on 30/08/2019
Article Processing Charge(s):	Fee Currency Date
Date Deposited:	06 May 2014 08:17
Last Modified:	27 Oct 2019 00:41
URI:	https://www.jdb.uzh.ch/id/eprint/34162