Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics
J Vac Sci Technol B Nanotechnol Microelectron
ISSN (P) 2166-2746
ISSN (E) 2166-2754
ISSN (L) 2166-2746
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)
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Item Type: | Journal/Series | ||||||||||||||||||||||||||||
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Publication Type: | Journal | ||||||||||||||||||||||||||||
Refereed: | Yes | ||||||||||||||||||||||||||||
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Publisher Statement: | For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]). | ||||||||||||||||||||||||||||
DOAJ: | No, journal is not listed in DOAJ | ||||||||||||||||||||||||||||
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Conflict: | No | ||||||||||||||||||||||||||||
Refereed Source: | Ulrichsweb | ||||||||||||||||||||||||||||
Ulrichsweb ID: | -1 | ||||||||||||||||||||||||||||
Sherpa Romeo Id: | 30676 | ||||||||||||||||||||||||||||
Divisions: | 07 Faculty of Science > Physics Institute | ||||||||||||||||||||||||||||
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R&P Contract available?: | Yes | ||||||||||||||||||||||||||||
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Date Deposited: | 06 May 2014 08:17 | ||||||||||||||||||||||||||||
Last Modified: | 24 Oct 2024 00:16 | ||||||||||||||||||||||||||||
URI: | https://www.jdb.uzh.ch/id/eprint/34162 |