Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics J Vac Sci Technol B Nanotechnol Microelectron ISSN (P) 2166-2746 ISSN (E) 2166-2754 ISSN (L) 2166-2746
Publisher: (435) American Institute of Physics (Alias: AIP)

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Item Type:	Journal/Series
Publication Type:	Journal
Refereed:	Yes
OA Permissions:	Article Version Allowed Embargo S/R Policy Id Conditions License Copyright Owner Accepted Manuscript Yes 7 Publisher copyright and source must be acknowledged with set statement (see policy) Must link to published version Published PDF Yes 12 Months 7 Must link to published version Publisher copyright and source must be acknowledged with set statement (see policy)
Publisher Statement:	For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ:	No
URL:	URL URL Type http://scitation.aip.org/content/avs/journal/jvstb Journal https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/ Sharing Content Online https://publishing.aip.org/resources/researchers/open-science/ Author Select https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/ AIP Publishing Policy for NIH/PubMed Central
Conflict:	No
Refereed Source:	Ulrichsweb
Ulrichsweb ID:	-1
Sherpa Romeo Id:	30676
Divisions:	07 Faculty of Science > Physics Institute
Article Processing Charge(s):	Fee Currency Date
R&P Contract Details:	Contract Name/Title Period of validity Contract ID or number URL of web page
Date Deposited:	06 May 2014 08:17
Last Modified:	25 Dec 2021 01:19
URI:	https://www.jdb.uzh.ch/id/eprint/34162