Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics
J Vac Sci Technol B Nanotechnol Microelectron
Publisher: (435) American Institute of Physics (Alias: AIP)
ISSN (P) 2166-2746
ISSN (E) 2166-2754
ISSN (L) 2166-2746
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Item Type: |
Journal/Series
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Publication Type: |
Journal |
Refereed: |
Yes |
OA Permissions: |
Article Version | Allowed | Embargo | S/R Policy Id | Conditions | License | Copyright Owner |
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Accepted Manuscript | Yes | | 7 | Publisher copyright and source must be acknowledged with set statement (see policy) Must link to published version | | | Published PDF | Yes | 12 Months | 7 | Must link to published version Publisher copyright and source must be acknowledged with set statement (see policy) | | |
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Publisher Statement: |
For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]). |
DOAJ: |
No |
URL: |
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Conflict: |
No |
Refereed Source: |
Ulrichsweb |
Ulrichsweb ID: |
-1 |
Sherpa Romeo Id: |
30676
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Divisions: |
07 Faculty of Science > Physics Institute |
Article Processing Charge(s): |
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Date Deposited: |
06 May 2014 08:17 |
Last Modified: |
26 Dec 2020 01:16 |
URI: |
https://www.jdb.uzh.ch/id/eprint/34162 |
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