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Journal Database (Zurich Open Repository and Archive)

Journal: Journal of Vacuum Science & Technology A J Vac Sci Technol A Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 0734-2101 ISSN (E) 1520-8559 ISSN (L) 0734-2101

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Item Type: Journal/Series
Publication Type: Journal
Refereed: Yes
OA Permissions:
Article VersionAllowedEmbargoS/R Policy IdConditionsLicenseCopyright Owner
Accepted ManuscriptYes7Publisher copyright and source must be acknowledged with set statement (see policy)
Must link to published version
Published PDFYes12 Months7Must link to published version
Publisher copyright and source must be acknowledged with set statement (see policy)
Publisher Statement: For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ: No
URL:
URLURL Type
https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/Sharing Content Online
https://publishing.aip.org/resources/researchers/open-science/Author Select
https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/AIP Publishing Policy for NIH/PubMed Central
Sherpa Romeo Id: 14745
Divisions: Unspecified
Article Processing Charge(s):
FeeCurrencyDate
Date Deposited: 06 Jul 2016 13:35
Last Modified: 27 Oct 2020 01:17
URI: https://www.jdb.uzh.ch/id/eprint/35996

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