Journal: Journal of Vacuum Science & Technology A J Vac Sci Technol A Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 0734-2101 ISSN (E) 1520-8559 ISSN (L) 0734-2101

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Item Type:	Journal/Series
Refereed:	Yes
Accepted Manuscript:	Yes
Published PDF:	Yes
Embargo Published PDF:	12 months
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Sherpa Romeo ID:	7
Sherpa/RoMEO conditions:	Authors retain copyright Author's pre-print on arXiv or preprint server Author's post-print on free e-print servers or arXiv, author's personal website, institutional website, funding-agency repository, institutional repository, or social academic network upon acceptance Publishers version/PDF may be used on author's personal website, arXiv, institutional website, institutional repository, funders designated repository or private forums on social academic network after 12 months embargo Must link to publisher version or journal home page Publisher copyright and source must be acknowledged with set statement (see policy) NIH-funded articles are automatically deposited with PubMed Central with open access after 12 <period For Medical Physics see AAPM policy This policy does not apply to Physics Today Publisher last contacted on 15/07/2016
Article Processing Charge(s):	Fee Currency Date
Date Deposited:	06 Jul 2016 13:35
Last Modified:	29 Oct 2018 01:21
URI:	https://www.jdb.uzh.ch/id/eprint/35996