Journal: Journal of Vacuum Science & Technology A
J Vac Sci Technol A
Publisher: (435) American Institute of Physics (Alias: AIP)
ISSN (P) 0734-2101
ISSN (E) 1520-8559
ISSN (L) 0734-2101
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Item Type: |
Journal/Series
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Publication Type: |
Journal |
Refereed: |
Yes |
OA Permissions: |
Article Version | Allowed | Embargo | S/R Policy Id | Conditions | License | Copyright Owner |
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Accepted Manuscript | Yes | | 7 | Publisher copyright and source must be acknowledged with set statement (see policy) Must link to published version | | | Published PDF | Yes | 12 Months | 7 | Must link to published version Publisher copyright and source must be acknowledged with set statement (see policy) | | |
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Publisher Statement: |
For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]). |
DOAJ: |
No |
URL: |
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Sherpa Romeo Id: |
14745
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Divisions: |
Unspecified |
Article Processing Charge(s): |
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Date Deposited: |
06 Jul 2016 13:35 |
Last Modified: |
24 Feb 2021 01:18 |
URI: |
https://www.jdb.uzh.ch/id/eprint/35996 |
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