Journal: Journal of Vacuum Science & Technology A J Vac Sci Technol A ISSN (P) 0734-2101 ISSN (E) 1520-8559 ISSN (L) 0734-2101
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)

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Item Type:	Journal/Series
Publication Type:	Journal
Refereed:	Yes
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Publisher Statement:	For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ:	No
URL:	URL URL Type https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/ Sharing Content Online https://publishing.aip.org/resources/researchers/open-science/ Author Select https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/ AIP Publishing Policy for NIH/PubMed Central
Sherpa Romeo Id:	14745
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Article Processing Charge(s):	Fee Currency Date
R&P Contract available?:	Yes
R&P Contract Details:	Contract Name/Title Period of validity Contract ID or number URL of web page American Institute of Physics Journals 01.01.2022 - 31.12.2022 AIP2022 https://avs.scitation.org/toc/jva/current
Date Deposited:	06 Jul 2016 13:35
Last Modified:	25 Apr 2022 00:20
URI:	https://www.jdb.uzh.ch/id/eprint/35996