Journal: Journal of Vacuum Science & Technology A
J Vac Sci Technol A
ISSN (P) 0734-2101
ISSN (E) 1520-8559
ISSN (L) 0734-2101
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)
There are no additional documents for this Publisher/Journal.
Item Type: | Journal/Series | ||||||||||||||||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Publication Type: | Journal | ||||||||||||||||||||||||||||
Refereed: | Yes | ||||||||||||||||||||||||||||
OA Permissions: |
|
||||||||||||||||||||||||||||
Publisher Statement: | For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]). | ||||||||||||||||||||||||||||
DOAJ: | No, journal is not listed in DOAJ | ||||||||||||||||||||||||||||
URL: |
|
||||||||||||||||||||||||||||
Sherpa Romeo Id: | 14745 | ||||||||||||||||||||||||||||
Divisions: | Unspecified | ||||||||||||||||||||||||||||
Article Processing Charge(s): |
|
||||||||||||||||||||||||||||
R&P Contract available?: | Yes | ||||||||||||||||||||||||||||
R&P Contract Details: |
|
||||||||||||||||||||||||||||
Date Deposited: | 06 Jul 2016 13:35 | ||||||||||||||||||||||||||||
Last Modified: | 25 Nov 2023 01:15 | ||||||||||||||||||||||||||||
URI: | https://www.jdb.uzh.ch/id/eprint/35996 |