Journal: Journal of Vacuum Science & Technology A J Vac Sci Technol A Publisher: (435) American Institute of Physics (Alias: AIP) ISSN (P) 0734-2101 ISSN (E) 1520-8559 ISSN (L) 0734-2101

There are no additional documents for this Publisher/Journal.

Item Type:	Journal/Series
Publication Type:	Journal
Refereed:	Yes
OA Permissions:	Article Version Allowed Embargo S/R Policy Id Conditions License Copyright Owner Accepted Manuscript Yes 7 Publisher copyright and source must be acknowledged with set statement (see policy) Must link to published version Published PDF Yes 12 Months 7 Must link to published version Publisher copyright and source must be acknowledged with set statement (see policy)
Publisher Statement:	For published Version: Copyright (year) AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in (citation of published article) and may be found at (https://doi.org/[doi]).
DOAJ:	No
URL:	URL URL Type https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/ Sharing Content Online https://publishing.aip.org/resources/researchers/open-science/ Author Select https://publishing.aip.org/resources/researchers/rights-and-permissions/pubmed-central/ AIP Publishing Policy for NIH/PubMed Central
Sherpa Romeo Id:	14745
Divisions:	Unspecified
Article Processing Charge(s):	Fee Currency Date
Date Deposited:	06 Jul 2016 13:35
Last Modified:	24 Feb 2021 01:18
URI:	https://www.jdb.uzh.ch/id/eprint/35996