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Journal: Journal of Vacuum Science & Technology. B, Nanotechnology & Microelectronics
J Vac Sci Technol B Nanotechnol Microelectron
ISSN (P) 2166-2746
ISSN (E) 2166-2754
ISSN (L) 2166-2746
Publisher: (435) American Institute of Physics (Alias: AIP, A I P Publishing LLC)